- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/30 - Electron-beam or ion-beam tubes for localised treatment of objects
Patent holdings for IPC class H01J 37/30
Total number of patents in this class: 708
10-year publication summary
|
93
|
73
|
77
|
57
|
55
|
59
|
50
|
33
|
33
|
14
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| NuFlare Technology, Inc. | 770 |
57 |
| ASML Netherlands B.V. | 6816 |
45 |
| FEI Company | 851 |
44 |
| Hitachi High-Tech Corporation | 4424 |
40 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
39 |
| Hitachi High-Technologies Corporation | 2034 |
25 |
| Applied Materials, Inc. | 16587 |
24 |
| Hitachi High-Tech Science Corporation | 326 |
22 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
16 |
| Applied Materials Israel, Ltd. | 549 |
12 |
| Carl Zeiss Microscopy GmbH | 1146 |
12 |
| Arcam AB | 204 |
10 |
| Axcelis Technologies, Inc. | 429 |
10 |
| Multibeam Corporation | 23 |
10 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 96 |
9 |
| Global Plasma Solutions, Inc. | 68 |
8 |
| Intel Corporation | 45621 |
7 |
| JEOL Ltd. | 556 |
7 |
| Mapper Lithography IP B.V. | 136 |
7 |
| Carl Zeiss SMT GmbH | 2646 |
6 |
| Other owners | 298 |